Mechanisms of the Phase Separation of Nonstoichiometric Si Oxide Films: What Can One Learn From Thermodynamics?

Mechanisms of phase separation in non-stoichiometric solutions of silicon oxide high-temperature annealing. Creating a matrix of silicon oxide and silicon nano-sized inclusions. Analysis of thermodynamic processes during the separation Si/Si oxide phase.

Рубрика Физика и энергетика
Вид статья
Язык английский
Дата добавления 30.07.2016
Размер файла 395,6 K

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