Effect of substrate temperature on the properties of PECVD SiCN films

SiCN system like a new kind of semiconductor materials that connect the best properties of silicon carbide and nitride. Characteristics of the variation of the Knoop hardness, nanohardness and Young’s modules as functions of substrate temperature.

Рубрика Физика и энергетика
Вид статья
Язык английский
Дата добавления 30.07.2016
Размер файла 631,9 K

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